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Download PDF by Minhang Bao: Analysis and Design Principles of MEMS Devices

By Minhang Bao

ISBN-10: 0444516166

ISBN-13: 9780444516169

ISBN-10: 1493302310

ISBN-13: 9781493302314

Sensors and actuators at the moment are a part of our lifestyle and seem in lots of home equipment, reminiscent of vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro structures inclusive of micro mechanical sensors, actuators and micro digital circuits. various MEMS units were constructed and lots of mass produced, however the info on those is greatly dispersed within the literature. This e-book offers the research and layout rules of MEMS units. the data is complete, targeting microdynamics, comparable to the mechanics of beam and diaphragm constructions, air damping and its impact at the movement of mechanical constructions. utilizing sensible examples, the writer examines difficulties linked to research and layout, and recommendations are integrated behind the booklet. the suitable complex point textbook for graduates, Analysis and layout rules of MEMS Devices is an appropriate resource of reference for researchers and engineers within the field.

* provides the research and layout rules of MEMS units extra systematically than ever before.

* comprises the theories crucial for the research and layout of MEMS contains the dynamics of micro mechanical structures

* an issue part is incorporated on the finish of every bankruptcy with solutions supplied on the finish of the book.

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Analysis and Design Principles of MEMS Devices by Minhang Bao

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